The 193nm filter is a high-performance optical component used in the deep ultraviolet (DUV) band, primarily applied in semiconductor lithography, spectral analysis, biomedical detection, and other fields. Below is an introduction to its core features and applications:

1. Optical Characteristics

• Center Wavelength: 193nm, corresponding to the output wavelength of ArF excimer lasers

• Bandwidth: Typically 10~15nm, with some models customizable for narrower bandwidths

• Transmittance: High transmittance design, with typical values >80%, and some high-end models reaching over 90%

• Blocking Depth: Excellent out-of-band suppression capability, with OD values reaching 4~6, effectively blocking non-target wavelengths