High Purity BA/EP Grade Semiconductor Vacuum Ball Valve Parameters

Operation Method: 1/4 Turn pneumatic open and close

Pressure Range: 2 bar ~ 1x10?? mbar

Leak Rate: 9x10?? mbar·l/sec

Material: 316 S.S, PTFE

Pressure: ≤2 bar

Temperature: ≤Cylinder 80°C / Body 100°C

Air Compression Connector: 2x1/4" NPT

Gas Pressure: 4-7 kg/cm2

Qigao primarily serves high-tech fields such as semiconductors, flat panel displays, solar energy, optoelectronics, vacuum coating, other high-performance vacuum systems, and scientific research institutions. Over the years, it has consistently held a major share of the global market. Qigao Valves specializes in the vacuum valve sector, and due to its R&D innovation and industry-renowned quality, many semiconductor chip equipment and solar equipment manufacturers extensively use Qigao's products in their machinery.

This section is the product display page for high-purity BA-grade semiconductor vacuum ball valves under Shanghai Qigao Valve Manufacturing Co., Ltd. Here, you can view product images, parameters, and other information about our semiconductor vacuum valves—specifically semiconductor vacuum ball valves. If you are interested, please feel free to contact us for consultation!