Zhongtu Instrument's Flexible Electronic Device Film Measurement Step Profiler is an ultra-precision contact-based microscopic profile measurement instrument capable of measuring film thickness, thin film height, surface morphology, surface waviness, surface roughness, and other parameters of micro and nanostructures.

The Flexible Electronic Device Film Measurement Step Profiler imposes no special requirements on the surface reflectivity, material type, or material hardness of the workpiece being measured. It offers broad sample adaptability, high data reproducibility, and stable, convenient, and efficient measurement, making it a widely used method for micro and nano sample measurements in microscopic surface analysis.

Product Features

1. Parameter Measurement Capabilities

1) Step Height: Capable of measuring step heights ranging from nanometers to 330μm or 1050μm, accurately measuring materials deposited or removed during processes such as etching, sputtering, SIMS, deposition, spin coating, and CMP.

2) Roughness and Waviness: Able to measure the roughness and waviness of samples. The analysis software calculates the scanned microscopic profile curve to obtain dozens of parameters related to roughness and waviness.

3) Stress Measurement: Can measure surface stress for various materials.

2. Measurement Modes and Analysis Functions

1) Single-Area Measurement Mode: After completing Focus, set the scan starting point and scan length based on the image navigation map to begin measurement.

2) Multi-Area Measurement Mode: After completing Focus, configure a single-area scan path based on the image navigation map. Multiple to hundreds of scan paths can be arrayed horizontally and vertically to form a multi-area measurement mode, enabling automatic measurement of all scan paths with a single click.

3) 3D Measurement Mode: After completing Focus, configure a single-area scan path based on the image navigation map. The entire scan area can be set according to the required scan width or the spacing and number of scan lines, enabling automatic scanning and 3D image reconstruction of the entire scan area with a single click.

4) SPC Statistical Analysis: Supports analysis of various indicator parameters for different types of measured components. Provides SPC charts for batch sample measurement data to track statistical trends.

3. Dual-Navigation Optical Imaging Function

The CP200-D model is equipped with a 5-megapixel color camera for front or oblique viewing. The front-view navigation system allows precise scan path setting, while the oblique-view navigation system enables real-time tracking of the scan trajectory.

4. Quick Stylus Change Function

The Flexible Electronic Device Film Measurement Step Profiler uses a magnetic stylus. When a stylus change is needed, the scanning stylus can be quickly replaced on-site and rapidly calibrated using the calibration module in the software, ensuring accuracy and repeatability after the change and reducing maintenance concerns.

Typical Applications