SEV-400 Glove Box Metal Organic Evaporation Coater
Vacuum Chamber: Adopts a vertical square structure with a horizontally sliding front door located inside the glove box. The front door facilitates loading and unloading of evaporation materials and samples in a protected environment, while the rear door allows for cleaning and maintenance of the vacuum chamber (the rear door is equipped with a locking mechanism to keep the chamber sealed and isolated from the atmospheric environment when inflated). The entire unit is positioned below the glove box, saving floor space;
Vacuum System: Utilizes a domestic molecular pump as the main pumping pump, achieving an ultimate vacuum of up to 2.0?10-5Pa. Alternatively, an imported magnetic levitation molecular pump or cryopump can be selected as the main pumping pump, achieving an ultimate vacuum of up to 3.0?10-6Pa;
Pumping Speed: From atmosphere to 5?10-4Pa ≤ 30 minutes (in glove box environment);
Substrate Holder: Accommodates up to 120mm substrates / 25 pieces of 15～25mm ITO/FTO glass. Customized integrated high-precision etching mask plates are available. The substrate holder rotates publicly with an adjustable speed of 0～20r/min. The substrate can be heated (adjustable and controllable from room temperature to 300°C) or water-cooled. The substrate holder is optionally liftable, with a maximum source-to-substrate distance of 350mm;
Evaporation Sources and Power Supplies: 4～6 groups of evaporation sources with European/American technology metal or organic beam source furnaces are available. Capable of multi-component co-evaporation for composite films or separate evaporation for multilayer films, offering powerful functionality and stable performance. Professional vacuum evaporation power supplies feature constant current/constant power control, with pre-settable current and power, enabling one-click start and stop automatic control functions;
Thickness Monitor: Employs domestic or imported thickness monitors for online monitoring and control of evaporation rate and film thickness;
Control Method: PLC + touch screen control system, equipped with air leakage self-check and prompts, communication fault detection, and one-click vacuum pumping and stopping functionality.