— The Preferred Choice for Industry Partners with Higher Demands for Control Accuracy and Repeatability

The E100 Series Yidu Intelligent Mass Flow Meter and Flow Controller (MFC) demonstrates outstanding performance in low zero-point, temperature, and pressure drift through precise compensation from built-in pressure and temperature sensors and core algorithms. Its robust metal housing ensures durability and strong resistance to electromagnetic interference in complex industrial environments. Additionally, it features built-in settings for multiple gases and gas mixtures, along with digital and analog communication methods, enabling precise flow measurement and control.

Flow Range: 0.5 sccm ~ 5000 slpm

Features:

l Principle: Laminar Differential Pressure Flow Meter

l High Accuracy: ±0.5% of set value

l High Repeatability: ±0.1% F.S.

l Wide Temperature and Pressure Range: -20°C ~ 60°C, up to 1 MPa

l Standard: Digital Signal RS485; Optional: Analog Signal 0-20mA or 0~5V

l Built-in Measurement for 70 Gases and Gas Mixtures

l PC Software Provided for Real-Time Display and Data Download

Operating Conditions:

l Compatible with Built-in 70 Gases and Editable Gas Mixtures

l Valve Type: N/C (Normally Closed)

l Operating Flow Range: 1% ~ 120% F.S.

l Medium Temperature: -20°C ~ 60°C

l Ambient Temperature: -20°C ~ 50°C

l Operating Humidity: 0% ~ 98% (Non-Condensing)

l Operating Pressure Difference Range: 100 kPa ~ 700 kPa

l Operating Pressure: 1 MPa

l Pressure Resistance: 1.5 MPa

l Power Supply Voltage: ﹢(19~29) VDC

l Current Consumption: ＜150 mA (at 24V power supply), ＜300 mA (at ＜5V)

l Installation: Any Angle

l Inlet/Outlet: Pipe Thread (Internal Thread)

l Gas Contact Material: SUS304, SUS316L

l Gas Contact Seal Material: O-ring Seal (Fluororubber)

Application Scenarios:

l Flow Control Components in Optical and Atomic Coating Equipment

l Integration and Support for Flow Control Systems in Manufacturing Equipment

l Flow Control Components in Fine Chemical Production Lines

l Flow Control Components in Bioreactor Systems

l Flow Control Components in Gas Distribution Systems or Devices

l Flow Control Components in Analytical and Scientific Instruments

l Flow Control Components in Customized Automated Equipment

The E100 Series Yidu Intelligent Mass Flow Meter and Flow Controller (MFC) is suitable for supporting users with higher requirements for precision and repeatability.